| 摘要 |
PROBLEM TO BE SOLVED: To provide a mask failure inspection device for precisely and stably inspecting the existence of a failure of a metal mask. SOLUTION: The mask failure inspection device 100 includes a tension jig unit 30 and an inspection unit 20 for inspecting the metal mask fixed by the tension jig unit. The tension jig unit 30 includes a support base 31 on which the metal mask MM to be inspected is mounted, clamp sections 32 that are arranged on the both sides of the support base and fixing both-side rims of the metal mask, a tension section 33 for applying tensile force to the metal mask fixed by the clamp section. The vertical distance d1 between the metal mask mounted on the support base and the inspection unit is set to be the same as or shorter than the vertical distance d2 between the clamp section and tension section and the inspection unit. COPYRIGHT: (C)2011,JPO&INPIT
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