| 摘要 |
PROBLEM TO BE SOLVED: To provide a reduced-pressure drier which can suppress the formation of dry unevenness on a coating film. SOLUTION: The drier dries the coating film coated on a substrate 1 in a reduced-pressure environment. The drier comprises a chamber part 10 having a substrate-housing part in which the substrate is housed, a plate part 20 arranged at the substrate-housing part and having a substrate-mounting surface 20a mounting the substrate, and a substrate-emerging device 30 positioning at a position where the substrate is mounted on the plate part and at a position apart from the plate part with a predetermined distance. The substrate-emerging device has a spout part 31 spouting a gas surfacing the substrate. The spout part is buried in the plate part. The substrate-mounting surface of the plate part and a spout surface of the spout part in which the gas spouts are set at the same height position, by which the substrate-mounting surface of the plate part is formed in a nearly uniform flat surface. COPYRIGHT: (C)2011,JPO&INPIT
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