| 摘要 |
PROBLEM TO BE SOLVED: To provide a supporting sheet for an object to be processed, without reducing the number of devices to be adopted, as well as, increasing the number. SOLUTION: The support sheet for the object to be processed is adhered on one side of the object to be processed and supports the object to be processed, and the support sheet includes: a sheet substrate; a layer for sticking which is formed on the sheet substrate and adhered to the object to be processed; and an annular reinforcing member integrated with the sheet substrate at an outer circumferential side of the sheet substrate. COPYRIGHT: (C)2011,JPO&INPIT |
