Reflective diffraction grating for e.g. spectral fragmentation of light in spectrometer, has metal layer including upper side comprising structure, dielectric layer applied on upper side, and another dielectric layer comprising structure

摘要

The grating (1) has a metal layer (2) including an upper side (3) comprising a blaze structure. A dielectric layer (4) is applied on the upper side of the metal layer. Another dielectric layer (5) is arranged on the former dielectric layer, and comprises a blaze structure e.g. anti-reflex structure. The dielectric layers exhibit flat sides, which are arranged on top of one another. One of the blaze structures exhibits an asymmetrical profile. The metal layer is formed as a coating on a structured non-metallic substrate. A side of the latter dielectric layer is turned away from the metal layer.