INK-JET HEAD AND MANUFACTURING METHOD THEREOF

摘要

PROBLEM TO BE SOLVED: To provide an ink-jet head and a manufacturing method thereof.

SOLUTION: There are provided the ink-jet head and the manufacturing method thereof. The ink-jet head includes an upper substrate of a silicon material in which an ink chamber for storing ink is formed; an intermediate substrate of a low-temperature simultaneous firing ceramic material joined with the intermediate substrate where a coupling path coupled with the ink chamber and a restrictor are processed and formed in the intermediate substrate; and a lower substrate of a silicon material joined with the intermediate substrate where a nozzle coupled with the coupling path is processed and formed in the lower substrate. According to this invention, the ink-jet head achieves precise joining between the substrates and facilitates the joining by joining the substrate formed of the silicon substrate with the ceramic substrate by anode joining, and the manufacturing method improves a production yield.

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