发明名称 |
METAL OXIDE-METAL COMPOSITE SPUTTERING TARGET |
摘要 |
Disclosed is a metal oxide-metal composite sputtering target which is useful for the formation of a recording layer for an optical information recording medium, said recording layer containing a metal oxide and a metal. Specifically disclosed is a composite sputtering target containing a metal oxide (A) and a metal (B), wherein the maximum value of the circle-equivalent diameter of the metal oxide (A) is controlled to 200 µm or less. |
申请公布号 |
WO2011034110(A1) |
申请公布日期 |
2011.03.24 |
申请号 |
WO2010JP65988 |
申请日期 |
2010.09.15 |
申请人 |
KOBELCO RESEARCH INSTITUTE, INC.;MATSUZAKI HITOSHI;TAKAGI KATSUTOSHI;JIKO NORIHIRO;EHIRA MASAYA |
发明人 |
MATSUZAKI HITOSHI;TAKAGI KATSUTOSHI;JIKO NORIHIRO;EHIRA MASAYA |
分类号 |
C23C14/34;G11B7/26 |
主分类号 |
C23C14/34 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|