| 摘要 |
PROBLEM TO BE SOLVED: To achieve improvement of detection sensitivity by an increase in the mass of a movable weight part while maintaining a Q value to be almost uniform. SOLUTION: This MEMS sensor which is formed by processing a multilayer structure formed on a substrate includes a capacity part 145 (145a and 145b) which has a movable weight part 120 joined to a fixed frame part 110 by an elastic deformation part 130 and having cavity parts 111 and 113 formed around, a fixed electrode part 150 (150a and 150b) fixed to the fixed frame part, and a movable electrode part 140 (140a and 140b) connected to the movable weight part and disposed opposite to the fixed electrode part, and a dummy capacity part 147 (147a and 147b) which has a dummy fixed electrode part 153 (153a and 153b) fixed to the fixed frame part and a dummy movable electrode part 143 (143a and 143b) connected to the movable weight part and disposed opposite to the dummy fixed electrode part and which does not output a detection signal. COPYRIGHT: (C)2011,JPO&INPIT
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