| 摘要 |
Disclosed is a plasma-generation device provided with: an ionization unit that ionizes a gas in a target space; an electromagnetic-wave generator that generates electromagnetic waves that irradiate the target space; and an antenna for irradiating a gas ionization region, which contains the gas ionized by the ionization means, with the electromagnetic waves supplied by the electromagnetic-wave generator. By ionizing a gas using the ionization unit and irradiating with electromagnetic waves from the antenna, a plasma is generated. When the electromagnetic-wave generator supplies electromagnetic waves to the antenna, the antenna forms a plurality of strong-electric-field regions having electric fields stronger than those in surrounding areas. The ionization means ionizes gas around the plurality of strong-electric-field regions or around said plurality of regions immediately before said regions become strong-electric-field regions. |
