发明名称 SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME
摘要 A semiconductor device and a method for manufacturing the same substantially prevent the degradation of the reliability and characteristics due to hot carriers by using a high-k dielectric material as a gate sidewall spacer material of a gate structure.
申请公布号 US2011068416(A1) 申请公布日期 2011.03.24
申请号 US20100848005 申请日期 2010.07.30
申请人 HYNIX SEMICONDUCTOR INC. 发明人 SON YUN IK
分类号 H01L29/78;H01L21/336 主分类号 H01L29/78
代理机构 代理人
主权项
地址