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发明名称
METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
摘要
申请公布号
KR101024712(B1)
申请公布日期
2011.03.24
申请号
KR20080049896
申请日期
2008.05.28
申请人
发明人
分类号
H01L21/308;H01L21/027
主分类号
H01L21/308
代理机构
代理人
主权项
地址
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