Embodiments of the present invention generally relate to a method and apparatus for ex-situ cleaning of a chamber component part. In one embodiment, a system for cleaning component parts in a cleaning chemistry is provided. The system comprises a wet bench set-up comprising a cleaning vessel assembly for holding one or more component parts to be cleaned during a cleaning process and a detachable cleaning cart detachably coupled with the cleaning vessel assembly for supplying one or more cleaning chemistries to the cleaning vessel assembly during the cleaning process.
申请公布号
WO2011034841(A2)
申请公布日期
2011.03.24
申请号
WO2010US48732
申请日期
2010.09.14
申请人
APPLIED MATERIALS, INC.;SOMMERS, JOSEPH, F.;WANG, JIANSHENG;DO, DAVID;ADAMALA, SATYANARAYANA;TRAHAN, RONALD
发明人
SOMMERS, JOSEPH, F.;WANG, JIANSHENG;DO, DAVID;ADAMALA, SATYANARAYANA;TRAHAN, RONALD