| 摘要 |
PROBLEM TO BE SOLVED: To reduce variation of a displacement characteristic caused by power loss associated with elongation and high-density formation of an actuator. SOLUTION: A piezoelectric member 12 has a first common external electrode 23 and an individual external electrode 23 on surfaces opposed to each other which are side surfaces to a driving surface of a piezoelectric element pillar 12A. Moreover, the piezoelectric member has a second common external electrode connected with the first common external electrode 23 on the surface where the individual external electrode 23 of the piezoelectric member 12 is formed in the piezoelectric element pillar. An FPC 15 is connected to the surface where the individual external electrode 23 of the piezoelectric member 12 is formed, thereby feeding an electricity to the individual external electrode 23 and the second common external electrode 25. The FPC has on a front end connected to the piezoelectric member 12, a common electrode wiring 32B connected astride a plurality of second common external electrodes 25 formed in a plurality of piezoelectric element pillars 12B, and an individual electrode wiring 32A arranged retreated from the front end direction from the common electrode line 32B and connected to the individual external electrode 23. COPYRIGHT: (C)2011,JPO&INPIT |
