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经营范围
发明名称
Heater heating a substrate and method for manufacturing the same
摘要
申请公布号
KR101023092(B1)
申请公布日期
2011.03.24
申请号
KR20090007872
申请日期
2009.02.02
申请人
发明人
分类号
H01L21/324;H01L21/02
主分类号
H01L21/324
代理机构
代理人
主权项
地址
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