| 摘要 |
PURPOSE: A vacuum pad for a vacuum chuck is provided to enable a target to be firmly fixed to the vacuum chuck since a contact area, which makes tight contact with the bottom of the target, is widely formed, and thus frictional force increases. CONSTITUTION: A vacuum chuck(100) comprises a vacuum-state forming device and an upper plate(102). The upper plate fixes a target to the top of the vacuum chuck. Vacuum holes(105) are bore on the upper plate and are connected to the vacuum-state forming device. The vacuum pad(1) is installed on the top of the vacuum chuck. The vacuum pad sucks and fixes the target in a vacuum state, which is formed by the vacuum-state forming device. The vacuum pad has a square section and a flat surface. The vacuum pad is formed in an integral seamless square-rim shape.
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