| 摘要 |
A tracking type laser gauge interferometer includes: a first recursive reflector 2 configured to reflect light parallel to incident light; a second recursive reflector 3 attached to a measurement object W; a main body part 4 configured to guide light emitted from a laser light source LS to the first recursive reflector 2; a rotating mechanism 5 configured to rotate the main body part 4; and a control unit 6 configured to control the rotating mechanism based on the light emergent from the main body part 4 and reflected at the second recursive reflector 3, wherein: the main body part 4 includes a light receiving element 92 configured to receive the light reflected at the first recursive reflector 2 and detect a position of the received light; and the control device 6 includes: an angle acquisition unit 63 configured to acquire a rotational angle of the rotating mechanism 5; and an correction unit 64 configured to correct a motion error of the rotating mechanism 5.
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