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发明名称
摘要
申请公布号	JP4655797(B2)	申请公布日期	2011.03.23
申请号	JP20050208548	申请日期	2005.07.19
申请人		发明人
分类号	H01L21/02;H01L21/265	主分类号	H01L21/02
代理机构		代理人
主权项
地址

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