发明名称 |
Hinge design for enhanced optical performance for a digital micro-mirror device |
摘要 |
An apparatus for use with a digital micro-mirror 100 includes a hinge 116 disposed outwardly from a substrate 102. The hinge 116 is capable of at least partially supporting a micro-mirror 104 disposed outwardly from the hinge 116. The micro-mirror 104 is capable of being selectively transitioned between an on-state position and an off-state position. In one particular embodiment, the hinge 116 comprises a substantially flat profile for at least a portion of the hinge 116 disposed between a first hinge post 108 of the hinge 116 and a mid-point of the hinge 116. The apparatus also includes a plurality of process control voids formed within a conductive layer 120 disposed inwardly from the hinge 116. In one particular embodiment, the substantially flat profile is at least partially created from the plurality of process control voids.
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申请公布号 |
US7911679(B2) |
申请公布日期 |
2011.03.22 |
申请号 |
US20070834567 |
申请日期 |
2007.08.06 |
申请人 |
TEXAS INSTRUMENTS INCORPORATED |
发明人 |
MANGRUM BRETT A.;STEVENSON CLAYTON L.;OSSENFORT JOHN P. |
分类号 |
G02B26/00;G02B26/08;G02F1/29 |
主分类号 |
G02B26/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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