METHOD OF FORMING MICROPATTERN,申请号KR20080067184-传众专利搜索

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发明名称	METHOD OF FORMING MICROPATTERN
摘要
申请公布号	KR101024143(B1)	申请公布日期	2011.03.22
申请号	KR20080067184	申请日期	2008.07.10
申请人		发明人
分类号	H01L21/027	主分类号	H01L21/027
代理机构		代理人
主权项
地址

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