发明名称
摘要 A semiconductor device has a semiconductor substrate, an insulating film, a semiconductor element and a resistance element. The semiconductor substrate has a first trench. The insulating film covers an inner surface of the first trench. The semiconductor element has an electrode. The resistance element is electrically connected to the electrode to form a resistance to a current flowing through the electrode, and is arranged in the first trench with the insulating film therebetween. Thereby, the semiconductor device can have a resistance element that has a small footprint and can pass a large current with high reliability.
申请公布号 KR101022300(B1) 申请公布日期 2011.03.21
申请号 KR20100057603 申请日期 2010.06.17
申请人 发明人
分类号 H01L29/73;H01L21/328 主分类号 H01L29/73
代理机构 代理人
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