| 摘要 |
PROBLEM TO BE SOLVED: To provide a positioning stage capable of reducing influence of vibrations of the stage and improving rigidity in a moving direction of the stage. SOLUTION: In a positioning stage, a position of a joint is adjusted so as not to change a position of a stage 1 to a position detection point in a moving direction of the stage 1 at the time of posture change of the stage 1 by vibration. A first weight 11 and a second weight 12 for adjusting a weight distribution of the stage 1 are provided in order to adjust the position. Then, an amount of adjustment of the first and second weights 11, 12 is determined so as to make a vibration mode of transfer characteristics of the stage 1 approach to 0 dB. COPYRIGHT: (C)2011,JPO&INPIT
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