发明名称 CUTTING METHOD
摘要 PROBLEM TO BE SOLVED: To provide a cutting method that manufactures no defective product by using a cutting blade having a V shape at its tip. SOLUTION: A cutting method cuts a processed object the surface of which is formed with a plurality of assumed division lines in a lattice form by using a cutting blade having a V shape at its tip. The cutting method includes a detection step where an amount and a direction of deviation from a center of a blade thickness to the tip of the V in the thickness direction of the cutting blade are detected, a corrective positioning step where the center of the blade thickness is positioned at a position away in a direction opposite to the direction of deviation by an amount of deviation from a position at which a center of assumed division lines and the center of the blade thickness coincide to each other, and a cutting step where the processed object is cut along the assumed division lines by means of the cutting blade with the tip of the V positioned at the center of the assumed division lines by the corrective positioning step. COPYRIGHT: (C)2011,JPO&INPIT
申请公布号 JP2011054751(A) 申请公布日期 2011.03.17
申请号 JP20090202170 申请日期 2009.09.02
申请人 DISCO ABRASIVE SYST LTD 发明人 SAKAI TOSHIYUKI
分类号 H01L21/301 主分类号 H01L21/301
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