| 摘要 |
PROBLEM TO BE SOLVED: To provide a light irradiating device capable of accurately controlling the irradiation angle of light, and performing divided alignment processing, while conveying substrates on a sheet-by-sheet basis. SOLUTION: The light irradiating device 1 is configured to have the substrate 100 irradiated, having first areas 104a and second areas 104b different from the first areas 104a disposed thereon, with light. The light irradiating device 1 includes a light source 10 for emitting the light 11; a wire-grid polarizer 20 for separating linear polarized light 11a from the light 11, which has been emitted from the light source 10; and a mirror unit 30 for reflecting the linear polarized light 11a so as to be made incident on the surface of the substrate 100. The mirror unit 30 includes mirrors 32 for partially reflecting the linearly polarized light 11a in a first direction D2 to be made incident on the first areas 104a; and mirrors 34 for reflecting other portions of the linearly polarized light 11a in a second direction D3 to be made incident on the second areas 104b. The first direction D2 and the second direction D3 are made mutually different. COPYRIGHT: (C)2011,JPO&INPIT
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