发明名称 |
Apparatus for Contained Chemical Surface Treatment |
摘要 |
Apparatuses for preparing a surface of a substrate using a proximity head includes a carrier to hold and move the substrate along an axis and a proximity head having a head surface with a plurality of outlet ports defined thereon. The proximity head is defined to be positioned proximate and over the carrier and the surface of the substrate. A length of the head surface of the proximity head is defined to be greater than a diameter of the substrate and at least partially overlapping over the carrier when the substrate is present. The proximity head includes a first set of outlet ports in a first region defining a first applicator that is configured to apply a non-Newtonian fluid between a surface of the carrier and the head surface of the proximity head. A second set of outlet ports in a second region of the proximity head defines a second applicator that is configured to apply a first chemistry to the surface of the substrate when present. The second region is adjacent to the first region. A third set of outlet ports in a third region of the proximity head defines a third applicator that is configured to apply the non-Newtonian fluid between the head surface of the proximity head and the surface of the substrate when present. The third region is defined adjacent to the second region. A fourth set of outlet ports is defined in the second region of the proximity head to substantially remove the first chemistry from the surface of the substrate when present.
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申请公布号 |
US2011061687(A1) |
申请公布日期 |
2011.03.17 |
申请号 |
US20100949762 |
申请日期 |
2010.11.18 |
申请人 |
LAM RESEARCH CORPORATION |
发明人 |
MIKHAYLICHENKO KATRINA;RAVKIN MIKE;REDEKER FRITZ;DE LARIOS JOHN M.;FREER ERIK M.;KOROLIK MIKHAIL |
分类号 |
B08B3/00 |
主分类号 |
B08B3/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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