| 发明名称 |
HYDROGEN BARRIER FOR FERROELECTRIC CAPACITORS |
| 摘要 |
An integrated circuit containing a FeCap array. The FeCap array is at least partially surrounded on the sides by hydrogen barrier walls and on the top by a hydrogen barrier top plate. A method for at least partially enclosing a FeCap array with hydrogen barrier walls and a hydrogen barrier top plate.
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| 申请公布号 |
US2011062550(A1) |
申请公布日期 |
2011.03.17 |
| 申请号 |
US20100718691 |
申请日期 |
2010.03.05 |
| 申请人 |
TEXAS INSTRUMENTS INCORPORATED |
发明人 |
UDAYAKUMAR KEZHAKKEDATH R.;SUMMERFELT SCOTT R.;MOISE TED S.;JAIN MANOJ K. |
| 分类号 |
H01L29/92;H01L21/02 |
主分类号 |
H01L29/92 |
| 代理机构 |
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代理人 |
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| 主权项 |
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