METHOD OF MANUFACTURING OPTICAL WAVEGUIDE CORE, METHOD OF MANUFACTURING OPTICAL WAVEGUIDE, OPTICAL WAVEGUIDE, AND OPTOELECTRIC COMPOSITE WIRING BOARD

摘要

In order to provide a method of efficiently manufacturing an optical waveguide core (16) having an endface (17) inclined at a predetermined angle, the following method of manufacturing an optical waveguide core is employed. The method includes: a core material layer (13) forming step of forming a core material layer formed of a photosensitive material on a cladding layer (12) that has been formed on a substrate; a covering step of covering a surface of the core material layer with a substance (15) having a refractive index higher than 1; an exposure step of pattern exposing the core material layer in a shape to from a core by irradiating the core material layer on a side covered with the high refractive index substance with exposure light inclined at a predetermined angle removing step of removing the high refractive index substance from the surface of the core material layer; and an development step of developing the core material layer so as to form the core having an inclined endface (17).