MULTI CURRENT SUPPLYING APPARATUS OF HIGH CURRENT ION IMPLANTAATION APPARATUS,申请号KR19920013974U-传众专利搜索

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发明名称	MULTI CURRENT SUPPLYING APPARATUS OF HIGH CURRENT ION IMPLANTAATION APPARATUS
摘要
申请公布号	KR950004152(Y1)	申请公布日期	1995.05.22
申请号	KR19920013974U	申请日期	1992.07.28
申请人	GOLDSTAR ELECTRON CO., LTD.	发明人	LEE, SONG - CHOL
分类号	H01L21/265;(IPC1-7):H01L21/265	主分类号	H01L21/265
代理机构		代理人
主权项
地址

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