| 摘要 |
PROBLEM TO BE SOLVED: To efficiently separate a glass substrate from a glass substrate laminate and accommodate it without damaging it. SOLUTION: A laminated substrate separating and accommodating device 10 is configured to separate each glass substrate 20 from the glass substrate laminate 30 formed by stacking a plurality of glass substrates 20 made of disk shape glass, and accommodate them. The laminated substrate separating and accommodating device 10 also includes on a base 12; a laminate accommodating holder 40; a substrate accommodating cassette 50; a liquid tank 60; a holder driving part 70; a laminated substrate positioning part 80; a cassette driving part 90; a cassette positioning part 110; a substrate extrusion mechanism 120; a substrate receiving mechanism 130; and a control device 200. The control device 200 includes: a holder position control part 210 which performs each control process based on each control program stored in advance in the memory ; a cassette position control part 220; a substrate extrusion control part 230; a substrate receiving control part 240; and a laminated substrate position control part 250. COPYRIGHT: (C)2011,JPO&INPIT |
