发明名称 Method for maintaining a smooth surface of crystallizable material
摘要 A method for maintaining a smooth surface of crystallizable material is disclosed. First, a substrate is provided. A target material layer is then formed on the substrate, with the target material being a crystallizable material. A protecting layer is subsequently formed on the target material layer. Next, an annealing treatment is implemented, with the surface of the target material layer, facing the protecting layer, being maintained in its original smooth state by the pressure and/or adhesion of the protecting layer. Finally, the protecting layer is removed to leave an open and smooth surface of the processed crystallizable material.
申请公布号 US2011065236(A1) 申请公布日期 2011.03.17
申请号 US20090607963 申请日期 2009.10.28
申请人 NATIONAL TAIWAN UNIVERSITY 发明人 LIN CHING-FUH;CHAO CHA-HSIN;LIN WEN-HAN
分类号 H01L21/20;C23C14/32;C25D7/12 主分类号 H01L21/20
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