| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a piezoelectric thin film element which dose not generate a crack in a film during manufacturing, has a high piezoelectric strain constant, and has good close contactness with a lower electrode; and to further provide an inkjet recording head using such piezoelectric thin film element, the inkjet recording head being capable of high resolution printing. <P>SOLUTION: The piezoelectric thin film element includes a piezoelectric film made of a polycrystal body, and an upper electrode and a lower electrode that are arranged by sandwiching the piezoelectric film. A crystal body of the piezoelectric film is formed in a direction substantially perpendicular to the electrode surfaces. <P>COPYRIGHT: (C)2011,JPO&INPIT |
