| 摘要 |
<P>PROBLEM TO BE SOLVED: To wire a piezoelectric element while preventing damage to the piezoelectric element with high reliability. <P>SOLUTION: A wiring member 19 which is laminated on a side different from the side of the piezoelectric element 17 of a load beam 15 for supplying power to an electrode on a side facing the load beam 15 is formed by sequentially laminating a conductive base material layer 19a, an electrical insulation layer 19b, and a conductive layer 19c from the piezoelectric element 17 side. The wiring member 19 has a conductive part 19c1 for electrically connecting the conductive layer 19c with a wiring connection part 15a1 through a through-hole 19b1 disposed in the electrical insulation layer 19b, and an island-shaped terminal part 19a1 that is formed by electrically isolating the part of the conductive base material layer 19a that continues to the conductive part 19c1. Power is supplied to the piezoelectric element 17 through the conductive part 19c1. <P>COPYRIGHT: (C)2011,JPO&INPIT |
