发明名称 THE METHOD FOR PREPARATION OF NANO TURF AT THE ANTIREFLECTION FILM USED IN SOLAR CELL AND THE METHOD FOR ENHANCING TRANSMITTANCE OF ANTIREFLECTION FILM OF SOLAR CELL
摘要 PURPOSE: A method for forming a nano protrusion on a surface of a reflection preventing film used in a solar cell and a method for increasing transmittance of the reflection preventing film are provided to attach a transparent polymer film to a glass first, thereby obtaining stability in forming a nano protrusion. CONSTITUTION: A transparent polymer film is attached to a glass. The glass is installed on an upper side of an electrode. The electrode is placed in a chamber. Plasma is generated by supplying power to the electrode. A transparent polymer film attached to the glass is etched to form a cone nano protrusion.
申请公布号 KR20110027918(A) 申请公布日期 2011.03.17
申请号 KR20090085734 申请日期 2009.09.11
申请人 KOREA INSTITUTE OF MACHINERY & MATERIALS 发明人 RHA, JONG JOO;LEE, KOO HYUN;JEONG, YONG SOO;KIM, WAN DOO
分类号 H01L31/042 主分类号 H01L31/042
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