发明名称 |
THE METHOD FOR PREPARATION OF NANO TURF AT THE ANTIREFLECTION FILM USED IN SOLAR CELL AND THE METHOD FOR ENHANCING TRANSMITTANCE OF ANTIREFLECTION FILM OF SOLAR CELL |
摘要 |
PURPOSE: A method for forming a nano protrusion on a surface of a reflection preventing film used in a solar cell and a method for increasing transmittance of the reflection preventing film are provided to attach a transparent polymer film to a glass first, thereby obtaining stability in forming a nano protrusion. CONSTITUTION: A transparent polymer film is attached to a glass. The glass is installed on an upper side of an electrode. The electrode is placed in a chamber. Plasma is generated by supplying power to the electrode. A transparent polymer film attached to the glass is etched to form a cone nano protrusion.
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申请公布号 |
KR20110027918(A) |
申请公布日期 |
2011.03.17 |
申请号 |
KR20090085734 |
申请日期 |
2009.09.11 |
申请人 |
KOREA INSTITUTE OF MACHINERY & MATERIALS |
发明人 |
RHA, JONG JOO;LEE, KOO HYUN;JEONG, YONG SOO;KIM, WAN DOO |
分类号 |
H01L31/042 |
主分类号 |
H01L31/042 |
代理机构 |
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主权项 |
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地址 |
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