| 摘要 |
PURPOSE: A device for arranging a wafer and inspecting the rear of the wafer is provided to prevent the wafer and a processor chamber from being damaged due to the input of a contaminated wafer by comprising the device for arranging a wafer and inspecting the rear of the wafer which is adjacent to a wafer chuck. CONSTITUTION: An oirentor(110) senses the position of an alignment mask displayed on a wafer. A wafer chuck(120) rotates the wafer according to the position information for arranging the wafer. An inspecting device(200) is arranged on the rear of the wafer and is adjacent to the wafer chuck. The inspecting device generates an alarm or process stop command when the contaminant is sensed. The inspecting device includes a sensor stage(221), a stage shaft(213), and a controller(222) which controls the driving of a cylinder.
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