| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate conveyance teaching method that can automatically generate highly accurate substrate conveyance information although it uses a drop type substrate holder. SOLUTION: In order to auto-teach an adequate position of a main transfer robot's hand 13A to a shuttle conveyance mechanism's hand 19A, a detected-side jig substrate 110 and a sensor side jig substrate 120 are used. The detected side jig substrate 110 is held at the hand 19A and the sensor-side jig substrate 120 is held at the hand 13A. The hands 13A and 19A are so-called drop type hands, and thus, a backlash is produced between the hand and the substrate. During auto-teaching, the backlash is as if canceled by the rods 101 and 54A of the cylinders 100 and 53A. Teaching position information indicating an adequate position of the hand 13A can be found by correcting the backlash. COPYRIGHT: (C)2007,JPO&INPIT |
