AN ILLUMINATION SYSTEM FOR MICROLITHOGRAPHY,申请号EP20040726980-传众专利搜索

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发明名称	AN ILLUMINATION SYSTEM FOR MICROLITHOGRAPHY
摘要
申请公布号	EP1649324(B1)	申请公布日期	2011.03.16
申请号	EP20040726980	申请日期	2004.04.13
申请人	CARL ZEISS SMT GMBH	发明人	SINGER, WOLFGANG;WIETZORREK, JOACHIM;HAINZ, JOACHIM;WEIRAUCH, GABRIELE;MAUL, MANFRED
分类号	G21K1/06;G03F7/20;G02B17/06	主分类号	G21K1/06
代理机构		代理人
主权项
地址

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