发明名称 |
Linear type deposition source |
摘要 |
A linear type deposition source capable of improving a heating efficiency and reducing a heating temperature by using a plate-type heating source and/or improving a cooling efficiency by including a cooling jacket having a cooling water line in a housing. The linear type deposition source includes: a crucible arranged in a deposition chamber, the crucible being for evaporating materials included in the crucible; a heating source for applying heat to the crucible; a housing for isolating the heat emitted from the heating source; an outer wall for anchoring the crucible; and a nozzle unit for spraying the materials evaporated from the crucible. In this deposition source, the heating source is a plate-type heating source, and the housing has a cooling water line so cooling water can flow through the cooling water line.
|
申请公布号 |
US7905961(B2) |
申请公布日期 |
2011.03.15 |
申请号 |
US20060515388 |
申请日期 |
2006.08.31 |
申请人 |
SAMSUNG MOBILE DISPLAY CO., LTD. |
发明人 |
JEONG MIN JAE;KIM DO GEUN;KANG HEE CHEOL |
分类号 |
C23C16/00 |
主分类号 |
C23C16/00 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|