PRE-DRYING DEVICE AND PRE-DRYING METHOD

摘要

PURPOSE: A preparatory drying device and method are provided to prevent stains from becoming formed on a coated film due to air current when the air is rapidly exhausted. CONSTITUTION: A preparatory drying device(3) comprises an elevating device(32), a transfer device, a gas feeder(34) and a heater(33). The elevating device emits gas to elevate a substrate(5). The transfer device transfers the elevated substrate to a main drying device. The gas feeder feeds gas to the elevating device. The heater heats the gas, which has been fed to the elevating device.