| 摘要 |
By simulating a manufacturing environment on the basis of appropriate simulation models, a schedule may be established in which process restrictions, tool availability and product entity status are automatically taken into consideration. Moreover, by estimating the process flow efficiency provided by a simulated time progression of the process flow in the environment, an optimized schedule may be established, which may be accomplished by identifying less efficient product entities and re-scheduling one or more product entities in order to obtain an enhanced process flow efficiency. The technique of the present invention may be advantageously applied to the processing of advanced mass products requiring sophisticated process tools and process sequences, such as the processing of semiconductor devices.
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