| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a vacuum pump and a method for operating the vacuum pump, decreasing the need for an additional component, unlike the related art requiring installation of an additional component between the vacuum pump and a chamber for solving such problems that vibration is generated by rotation of a rotor in a vacuum pump, particularly to a turbo-molecular vacuum pump, and the vibration is transmitted to a chamber to which the vacuum pump is fixed, so that character frequency of the chamber bearing an integer ratio relationship with a rotating speed is significantly excited, in a fixed rotating speed. <P>SOLUTION: The method for operating a vacuum pump having the rotor and a drive device making the rotor rotate at a certain rotating speed, includes a change process 36 reducing generation of excitation by the vacuum pump. In the changing process, the rotating speed of the rotor is periodically changed between a first rotating speed value 38 and a second rotating speed value 39. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
