| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a mechanically rugged thermal humidity sensor with high accuracy. <P>SOLUTION: The thermal humidity sensor 1 includes a diaphragm 2 (bridge structure) formed on a planar substrate composed of a material with good thermal conductive material such as silicone and ceramics, temperature detecting resistors 4, 5, 6, 7 on the diaphragm 2, and a heating resistor 3 thereon surrounding the temperature detecting resistors. Then, humidity is detected based on the outputs of temperature detecting resistors 4, 5, 6, 7. This reduces an error in humidity measurement influenced by heat coming away from the diaphragm 2 to the planar substrate. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
