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发明名称
Substratverarbeitungsvorrichtung
摘要
申请公布号
DE60045588(D1)
申请公布日期
2011.03.10
申请号
DE2000645588
申请日期
2000.10.18
申请人
TOKYO ELECTRON LTD.
发明人
ISSEI, UEDA;SHINICHI, HAYASHI;NARUAKI, IIDA;YUJI, MATSUYAMA;YOICHI, DEGUCHI
分类号
H01L21/00;H01L21/02;G07C9/00;G08G3/00;H01L21/677
主分类号
H01L21/00
代理机构
代理人
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