| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for heat-treating a treatment object capable of automatically tuning a recipe on a film type basis even when the film type of a treatment object part is different. <P>SOLUTION: This method for heat-treating the treatment object includes processes of: irradiating a treatment object part 104 with a laser to raise the temperature of the treatment object part 104 toward a target value; measuring the temperature of the treatment object part 104 irradiated with the laser; and controlling the wavelength of the laser, the output thereof, or both the wavelength and the output thereof so that the temperature of the treatment object part 104 comes close to the target value, based on the measurement result. <P>COPYRIGHT: (C)2011,JPO&INPIT |
