| 摘要 |
PROBLEM TO BE SOLVED: To provide a liquid processing apparatus which can reduce the amount of liquids used and reduce the difference of the process level between objects to-be-processed. SOLUTION: The liquid processing apparatus 10 includes a main pipe 20, a liquid supply device 40 connected to the main pipe, a main valve 22 provided to the main pipe, a plurality of branch pipes 25 branching off from the main pipe, and a plurality of processing units 50 connected to the respective branch pipes. The liquid supply device includes a mixer 43 provided on the main pipe, a first liquid supply pipe 41b supplying a first liquid, and a second liquid source 42a supplying a second liquid, and supplies a mixed liquid prepared by mixing the first and second liquids in the mixer to the main pipe from one side. The main valve is configured to close the other end of the main pipe opposite to the liquid supply device when the object to-be-processed is processed in the processing unit. COPYRIGHT: (C)2011,JPO&INPIT
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