MICRO-ELECTRO-MECHANICAL SYSTEMS (MEMS), SYSTEMS, AND OPERATING METHODS THEREOF

摘要

A micro-electro-mechanical system (MEMS) includes a micro-mechanical structure that is capable of generating a first electrical signal. An analog-to-digital converter (ADC) is coupled with the micro-mechanical structure. The MEMS is free from including any amplifier between the micro-mechanical structure and the ADC.