| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a light irradiation device and a light irradiation method such that even when light, such as an ultraviolet ray, passed by an adherend to the one surface of which an adhesive sheet is stuck is reflected on the other surface side, the other surface side of the adherend is not irradiated. <P>SOLUTION: The light irradiation device 10 which irradiates an adhesive sheet S having a layer of an ultraviolet curing type adhesive AD stuck to one surface of a semiconductor wafer W with an ultraviolet ray includes an ultraviolet lamp 19 disposed on the one surface side of the semiconductor wafer W, and a cover material 13 disposed on the other surface side of the semiconductor wafer W and blocking leakage of the ultraviolet ray passed by the semiconductor wafer W. A light shielding means 14 is provided in the cover material 13 to inhibit irradiation onto the other surface side of the semiconductor wafer W with light reflected by the cover material 13. <P>COPYRIGHT: (C)2011,JPO&INPIT |
