| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a thin film vapor deposition apparatus, and to provide a method for manufacturing an organic emission display by using the thin film vapor deposition apparatus. <P>SOLUTION: The thin film vapor deposition apparatus can be easily applied to the mass production process of a large-sized substrate, and has an improved production yield, and the method for manufacturing an organic emission display utilizes the same is also provided. A vapor deposition substance 115 released from a vapor deposition source 110 is passed through a vapor deposition source nozzle part 120 and a patterning slit sheet 150 to be vapor-deposited on a substrate 400 at a desired pattern. When the temperatures of a shield plate assembly 130 and the patterning slit sheet 150 are sufficiently low, the vapor deposition substances 115 radiated to no-desired directions are all absorbed to the face of the shield board assembly 130 to retain a high vacuum, thereby the straight travelling properties of the vapor deposition substances can be secured without generating collision between the vapor deposition substances. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
