| 摘要 |
PURPOSE: A photovoltaic device and a manufacturing method thereof are provided to improve the efficiency of the photovoltaic device by adding carbon or nitrogen when a middle reflection layer is formed. CONSTITUTION: A photovoltaic device includes a substrate, a first unit cell(30), a middle reflection layer(40), and a second unit cell(50). The first unit cell is positioned on the substrate and includes a p type layer, an I type photoelectric conversion layer, and an n type layer. The middle reflection layer is positioned on the first unit cell and includes hydrogenated n type microcrystalline silicon carbide or hydrogenated n type microcrystalline silicon nitride. The second unit cell is positioned on the middle reflection layer and includes a p type layer, an I type photoelectric conversion layer, and an n type layer. |
