| 摘要 |
<p>A thin-film solar cell manufacturing apparatus, includes: a film formation space (81) in which a substrate (W) is disposed so that a film formation face of the substrate (W) is substantially parallel to a direction of gravitational force, and in which a desired film is formed on the film formation face by a CVD method; a cathode unit (68, 118, 128) including cathodes (75) to which a voltage is applied, and two or more power feeding points (88), the cathodes (75) being disposed at both sides of the cathode unit (68, 118, 128); and an anode (67) distantly disposed so as to face the cathodes (75) that are disposed at both sides of the cathode unit (68, 118, 128).</p> |
