发明名称 |
Stage for scanning probe microscopy and sample observation method |
摘要 |
<p>It is an object of the invention to provide a stage for scanning probe microscopy that can be used in any kind of SPM and can effectively irradiate light to a sample and a solution near the sample without irradiated light blocked by a cantilever. The stage for scanning probe microscopy of the invention is a stage for scanning probe microscopy for fixing a sample substrate that mounts a sample; to be observed thereon and has optical transparency and includes an opening that is provided below a portion where the sample substrate is fixed and that has an opening area included within the sample substrate in plan view. Light is irradiated from a bottom surface of the sample substrate onto the sample through the opening.</p> |
申请公布号 |
GB2473368(A) |
申请公布日期 |
2011.03.09 |
申请号 |
GB20100020168 |
申请日期 |
2008.06.27 |
申请人 |
NIPPON TELEGRAPH AND TELEPHONE CORPORATION;ISIS INNOVATION LIMITED |
发明人 |
NAHOKO KASAI;YUICHI HARADA;CHANDRA SEKAR RAMANUJAN |
分类号 |
G01Q30/02 |
主分类号 |
G01Q30/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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