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发明名称
摘要
申请公布号	JP4647213(B2)	申请公布日期	2011.03.09
申请号	JP20030560891	申请日期	2002.12.13
申请人		发明人
分类号	G02F1/133;G09F9/30;G02F1/1335;G02F1/1343;G09F9/35;G09G3/20;G09G3/34;G09G3/36;H01L51/50;H05B33/12	主分类号	G02F1/133
代理机构		代理人
主权项
地址

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