发明名称 |
DROPLET DISCHARGING APPARATUS |
摘要 |
PURPOSE: A droplet discharging device is provided to supply the droplet of the smaller size by spraying the air to the droplet which is formed at the end part of a nozzle. CONSTITUTION: A droplet discharging device includes nozzles(112,114), a housing(121), and a gas supplying pipe(148). The liquid is supplied to the nozzle. The one-side end of nozzle is opened and discharges the droplet. In the housing, a spraying part(123) which sprays the gas towards the opened end part of a nozzle is formed. The spraying part is arranged to be adjacent to the periphery of nozzle. The gas supplying pipe supplies the gas to the nozzle.
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申请公布号 |
KR20090108918(A) |
申请公布日期 |
2009.10.19 |
申请号 |
KR20080034274 |
申请日期 |
2008.04.14 |
申请人 |
POSTECH ACADEMY-INDUSTRY FOUNDATION |
发明人 |
KIM, IN TAE;LIM, GEUN BAE;KIM, SEONG WAN |
分类号 |
H01L21/02;H01L21/00 |
主分类号 |
H01L21/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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